Data Processing in XPS/ESCA and AES  (1 day)

XPS and AES are used to determine the atoms present at a surface, and their concentrations, chemistries, and lateral and depth distributions. This course will show attendees how to process and evaluate XPS and AES spectra:

• Spectra – the many features present in spectra will be described.
• Background subtraction methods will be described and compared.
• Shapes of peaks will be described and approaches for curve fitting will be illustrated.
• Approaches for quantitative analysis will be demonstrated and errors illustrated.
• Data processing methods to improve images will be demonstrated.
• Data processing methods for near-surface, non-destructive depth profiling will be illustrated.
• Data processing methods to remove peak overlap problems, separate different chemical states, and improve signal-to-noise in sputter depth profiles will be demonstrated.
• Spectra – the many features present in spectra will be described.